Microstructure analysis of RF plasma synthesized TiCN nanopowders

Titanium carbonitride nanoparticles produced from the inductively coupled plasma process were investigated by high resolution analyses such as transmission electronic microscopy and energy electron loss spectroscopy. TiCN nanopowders with grain sizes below 30 nm were obtained. The control of the plasma chemistry and the residence time of the precursors in a temperature above the boiling point of TiCN lead to either stoichiometric, or C-rich or also N-rich nanopowders. A surface oxidation takes place when the nanoparticles are brought to air for ex situ characterizations after thermal plasma processing.