NeoFlash - True Logic Single Poly Flash Memory Technology

A new simple and low cost logic based single poly flash memory technology (NeoFlash reg ) with fast programming and high reliability is demonstrated in this paper. With merely 3 additional noncritical masks, the SONOS based technology has been successfully embedded into 0.18mum CMOS logic process. Hot electron injection is utilized to achieve fast programming. Uniform channel tunneling erasure and hot-hole-free operation scheme reinforce reliability and endurance characteristics. Due to the simplicity in cell structure, process and design, small chip area of 2.93mm (cell size 0.76mum) is achieved for 2Mbit embedded flash. Performance of a 2Mbit array proves the great feasibility of this true logic single poly flash memory technology