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Mechanical analysis of a SiLK/Cu dual damascene interconnect system
Mechanical analysis of a SiLK/Cu dual damascene interconnect system
2000
Joost Waeterloos
E. O. Shaffer
Theodore M. Stokich
R. A Donaton
Karen Maex
Keywords:
SILK
Copper interconnect
Composite material
Materials science
Interconnection
Correction
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