Reduced thermal budget processing of Y–Ba–Cu–O high temperature superconducting thin films by metalorganic chemical vapor deposition

1991 
Metalorganic chemical vapor deposition (MOCVD) has the potential of emerging as a viable technique to fabricate ribbons, tapes, coated wires, and the deposition of films of high temperature superconductors, and related materials. As a reduced thermal budget processing technique, rapid isothermal processing (RIP) based on incoherent radiation as the source of energy can be usefully coupled to conventional MOCVD. In this paper we report on the deposition and characterization of high quality superconducting thin films of Y–Ba–Cu–O (YBCO) on MgO and SrTiO3 substrates by RIP assisted MOCVD. By using a mixture of N2O and O2 as the oxygen source films deposited initially at 600 °C for 1 min and then at 740 °C for 30 min are primarily c‐axis oriented and with zero resistance being observed at 84 and 89 K for MgO and SrTiO3 substrates, respectively. The zero magnetic field current densities at 77 K for MgO and SrTiO3 substrates are 1.2×106 and 1.5×106 A/cm2, respectively. It is envisaged that high energy photons f...
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