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Simulation of the Erosion Groove and Vapor Distribution of a Linear Magnetron Sputtering Cathode
Simulation of the Erosion Groove and Vapor Distribution of a Linear Magnetron Sputtering Cathode
2014
S.M. Elliott
Moataz M. Attallah
K. Cooke
Khamis Essa
D. Ievlev
J. Simkin
E. K. White
Keywords:
Erosion
Sputter deposition
Cathode
Analytical chemistry
Materials science
Composite material
Groove (music)
Correction
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