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Deposition of Top Electrode Films for OLED by Low Damage Sputter-deposition Process
Deposition of Top Electrode Films for OLED by Low Damage Sputter-deposition Process
2015
Hoshi Yoichi
Hamaguchi Daichi
Kobayashi Shin-Ichi
Uchida Takayuki
Sawada Yutaka
Shimizu Hidehiko
Keywords:
Sputter deposition
Electrode
Analytical chemistry
Materials science
OLED
Deposition (law)
Optoelectronics
Correction
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