Sol-gel template synthesis of BaTiO3 films with nano-periodic structures

Abstract BaTiO 3 films with novel nano-periodic structures were prepared by a sol-gel template synthesis. A through-hole type anodic aluminum oxide film was used as a template. The nano-periodic structure was drastically modified by applying a spray cleaning process during spin-coating of the template with a BaTiO 3 sol. The formation mechanism was discussed from the viewpoint of liquid bridge force and surface tension applied during the drying process. The novel structures are promising for various functional devices, in which the nano-periodicity improves their performance.