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The effect of mixed abrasive slurry on CMP of 6H-SiC substrates
The effect of mixed abrasive slurry on CMP of 6H-SiC substrates
2009
Hojun Lee
Boumyoung Park
Sukhoon Jeong
Sukbae Joo
Haedo Jeong
Keywords:
Composite material
Materials science
Metallurgy
Abrasive
Slurry
Correction
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