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PVDによるTi-C-N薄膜生成に及ぼすイオンの効果
PVDによるTi-C-N薄膜生成に及ぼすイオンの効果
1995
motonori tamura
naoki okumura
Keywords:
Ion plating
Adhesion
Ion
Inorganic chemistry
Grain size
Materials science
Chemical engineering
Correction
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