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Effect of Crystal Orientation on Material Removal Characteristics in Sapphire Chemical Mechanical Polishing
Effect of Crystal Orientation on Material Removal Characteristics in Sapphire Chemical Mechanical Polishing
2017
Sangjin Lee
Sangjik Lee
Hyoungjae Kim
Chuljin Park
Keunyong Sohn
Keywords:
Composite material
Chemical-mechanical planarization
Sapphire
Materials science
crystal orientation
material removal
Correction
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