Line Seeds With Parabolic Profile For Glancing Angle Deposition

This paper presents the design of line seeds for GLancing Angle Deposition (GLAD). GLAD is an advanced physical vapor deposition technique for creating three-dimensional nanofeatures including pillars, springs, zigzags, and even ribbons. Seeding is an important pretreatment scheme for obtaining periodical GLAD features. Line seeds are one-dimensionally symmetrical seeds that are commonly used for creating nanoribbons and nanocracks. In this paper, we discuss how to design line seeds to create nanoribbons using GLAD. Long and continuous solid ribbons are obtained on the line seeds with a parabolic profile by GLAD. The thickness of the ribbons is optimized by tuning the geometry of the seeds. The design and fabrication of the nanoribbons using GLAD can be applied in strain sensing and the creation of nanoporous materials.