A 1.5 V supplied, CMOS ASIC for the actuation of an electrostatic micromotor

The use of electrostatic forces in micromechanical systems is well known but needs quite high voltages to produce usable forces. In this perspective paper, we present an autonomous, nonresonant, open-loop, 1.5 V battery-supplied high voltage integrated circuit able to drive an electrostatic micromotor, for opening the way to future portable applications (wristwatch like).