Performance Improving of KRISS Micromachined Multijuntion Thermal Converter

Thin-film multijunction thermal converters (MJTCs) with chromel-constantan thermocouples and an Evanohm R alloy heater were fabricated using semiconductor process and bulk micromachining. The voltage sensitivity and the ac-dc voltage transfer differences were evaluated. And the ac-dc transfer differences seem to be stabilized below the value of 1 ppm in the frequency range from 1 kHz to 500 kHz