Amorphous hydrocarbon film, and sliding member and sliding system provided with said film
2016
According to the present invention, a low-friction coating 5 includes: an aliphatic hydrocarbon group that exhibits a peak in a region of 2900-3000 cm -1 in an infrared absorption spectrum; a carbonyl group that exhibits a peak in a region of 1650-1800 cm -1 in an infrared absorption spectrum; an aromatic component (C 7 H 7 + ) that exhibits a peak at mass 91.1 in a positive ion spectrum obtained by TOF-SIMS; and a fused ring component (C 9 H 7 + ) that exhibits a peak at mass 115.2 in a positive ion spectrum obtained by TOF-SIMS.
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