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Development of new maleimides applied to spin-on carbon hardmask with characteristics of high heat resistance and good planarization
Development of new maleimides applied to spin-on carbon hardmask with characteristics of high heat resistance and good planarization
2019
Junya Horiuchi
Takashi Makinoshima
Takashi Sato
Yasushi Miki
Masatoshi Echigo
Masayoshi Ueno
Koichi Yamada
Keywords:
Carbon
Optoelectronics
Chemical-mechanical planarization
Spin-½
Materials science
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