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40 kHz PECVD of AlOx/SiNx Stacks Demonstrated in Industrial High Efficiency PERC Production
40 kHz PECVD of AlOx/SiNx Stacks Demonstrated in Industrial High Efficiency PERC Production
2016
W.K.W. Huang
K. C. Lin
K.H. Hung
H. H. Wu
S. Wiebecke
J. Chen
K. Hsü
Wolfgang Jooss
U. Walk
A Nickel
V.X. Nguyen
J.-U. Fuchs
T. Pernau
Keywords:
Aluminium oxide
Passivation
Plasma-enhanced chemical vapor deposition
Electronic engineering
Composite material
Materials science
Optoelectronics
Stack (abstract data type)
Correction
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