In situ growth and doping of oxycarbonate Sr2CuO2(CO3) epitaxial thin films

Abstract Epitaxial cuprate oxycarbonate Sr 2 CuO 2 (CO 3 ) thin films have been prepared by metal–organic chemical vapor deposition. The effects of deposition conditions on phase stability have been determined. X-ray diffraction, transmission electron microscopy, Rutherford backscattering spectroscopy, inductively coupled plasma atomic emission spectroscopy, and Fourier transform infrared spectroscopy were used to characterize the oxycarbonate thin films. The resistivity of the undoped Sr 2 CuO 2 (CO 3 ) thin films decreases from ∼0.2 Ω cm to ∼0.01 Ω cm upon post annealing in oxygen, but semiconducting behavior is observed. Doping has been achieved through partial substitution of BO 3 3− for CO 3 2− . Superconductivity with a T c (onset) of 34 K and a T c (zero) of 20 K has been obtained.