Research on fabrication of multi-electrode arrays by direct laser technology

A4×4 multi-electrode array(MEA), one of the most useful tools for research on the cell electrophysiology, was fabricated on fused quartz using the laser micro-cladding electronic paste(LECEP) technology, and the heater resistance together with the heat sensitive resistance were painted on the backside of the glass by using the micro-pen technology, thus the integration of the micro-electrodes, the electrical heat apparatus and the heat sensitive apparatus was completed. The impedance of the micro-electrodes and the performance of the heater were tested, and then neural cells were cultured on the MEA. The results showed that the line width was correlated to the current, the diameter of diaphragm, the electronic plasma material, the thickness of electronic paste, and the substrate material. The performance of the MEA and the micro heater was primarily meeting the requirement. Because the component of the electronic plasma material is a little harmful to the cells activity, the further study will aim at replacing the material to ensure the biocompatibility.