The formation of nanoparticles in laser-induced SiH4 gas reactions

Abstract Ultrafine powders with a mean particle diameter (20–30) nm were synthesized from high purity SiH 4 by laser-induced gas phase reactions and studied by transmission electron microscopy. Results showed that the powders consisted of Si crystals with an amorphous shell, or spherical Si crystals without the shell. Twinning of crystals often took place. Both types of crystals: poly and mono were observed inside an amorphous shell. The mechanism of the formation of all types of nanoparticles is proposed.