Breakthrough in high performance inertial navigation grade Sigma-Delta MEMS accelerometer

In this paper, we report a Sigma-Delta MEMS navigation grade accelerometer, which, to our knowledge, is the first reported MEMS accelerometer to reach navigation grade performances. This reported system encompasses a high stability and high shock resistance mechanical MEMS sensor, a 5 th -order sigma-delta closed-loop electronic with digital loop filtering and high stability voltage reference.