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MEMS micro-bridge structure-based process platform fabricated with CMOS Al BEOL compatible process
MEMS micro-bridge structure-based process platform fabricated with CMOS Al BEOL compatible process
2019
Xiaoxu Kang
Xiaolan Zhong
Ruoxi Shen
Qingyun Zuo
Ming Li
Shoumian Chen
Yuhang Zhao
Xingwang Zhu
Limin Zhu
Shanshan Liu
Jianmin Wang
Hanwei Lu
Wei Wang
Zijing Ye
Jianpeng Wang
Bo Zhang
Keywords:
Optics
Microelectromechanical systems
Optoelectronics
Compatibility (mechanics)
Physics
CMOS
Correction
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