A method of manufacturing a micro-LED matrix

2012 
A method of manufacturing a micro-LED matrix following method steps comprising: A deposition of a LED layer structure on a work substrate (5); B separating a plurality of LED structures (6) from the LED layer structure on the work substrate (5); C applying a first contacting structure (4) to a carrier substrate (1); D Transfer of the plurality of LED structures (6) by the working substrate (5) on the carrier substrate (1) by bonding and laser lift-off; wherein an at least two-layer carrier substrate (1) is used, comprising a carrier layer (2) and a first flexible polymer layer (3), wherein the first contacting structure (4) is applied directly or indirectly on one of the carrier layer (2) side facing away from the first polymer layer (3) in step C and is being formed in an additional process step D 0, a second flexible polymer layer between the process steps C and D (13) at least between the singulated LED structures (6) to embed them.
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