NEMS gas sensors for breakthrough GC multigas analysis systems

This paper presents NEMS gas sensors implemented in a breakthrough multigas analysis system. The NEMS mass sensors are collectively fabricated, functionalized and packaged at wafer level. NEMS array resonators exhibit good frequency stability (Allan deviation −7 in air). After implementation in the multigas analysis system, the capability to analyze complex gas mixtures for Industrial and Indoor Air Quality monitoring has been demonstrated, with typical Limit of Detection in ppm down to ppb level.