Method and apparatus for optimizing tco film solar cell resistance and transparency

The present invention provides for depositing a TCO (transparent conductive oxide) film manufacturing tool in a chamber, and then a light energy irradiation method and system TCO film in another chamber of the same tool. In some embodiments, the TCO film used in solar cells and TCO film formed on a solar cell substrate. The method includes applying energy with a time and TCO film, to reduce the resistance of the TCO film without reducing the transparency. Using one or more light sources in a light irradiation chamber. Independently or collectively using the infrared range, visible range and light in the ultraviolet range. The present invention also provides a method and apparatus for optimizing solar cell TCO film resistance and transparency.