Laterally moving bi-stable MEMS DC-switch for biomedical applications

We have designed a bi-stable micro electro mechanical switch for an implantable lead electrode multiplexer application. It is easy to fabricate using only one mask. Applying an 18 V pulse to the actuators induces state changes. Total size of the structure is approximately 1.5 mm/spl times/1.5 mm. The contact resistance stays consistently below 30 Ohm for the first 40000 cycles.