Influence of deposition parameters on structural, morphological and optical properties of ZnO films using robust design approach

This paper investigates the influence of deposition parameters on the crystallite size, roughness and transmittance of zinc oxide thin films by sol-gel technique using L9 orthogonal array. The thin films were deposited on the quartz substrate and the coating parameters were investigated for the influence of sucrose fuel, spinning speed, spinning duration and calcination temperature. Crystallite size was influenced by sucrose by 54.34%. Calcination temperature influenced roughness and transmittance by 57.49% and 68.56% respectively. The process yielded thin films with surface roughness of 131.45 nm, crystallite size of 12.78 and transmittance of 82.58% for the treatment sucrose 0.6 gram, spinning speed of 3,000 rpm, spinning duration of 30 seconds and calcination temperature of 900°C.