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Alternative Gate Dielectric Materials
Alternative Gate Dielectric Materials
2006
Sven Van Elshocht
An Hardy
S. De Gendt
Christophe Adelmann
Peter Baumann
David P. Brunco
Matty Caymax
Thierry Conard
Pietro Delugas
P. Lehnen
Olivier Richard
E. Rohr
Denis Shamiryan
Rita Vos
T. Witters
Paul Zimmerman
Marlies K. Van Bael
Jules Mullens
Marc M. Meuris
Marc Heyns
Keywords:
Gate dielectric
Electronic engineering
Materials science
Optoelectronics
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