Non-single crystal film, substrate with non-single crystal film, method and apparatus for producing the same, method and apparatus for inspecting the same, thin film transistor, thin film transistor

A method for manufacturing a non-single crystal thin film periodically improved while reducing the particle size diameter of the dispersed grains. To this end, a method for producing a non-Dan Jing film of the present invention comprises: after the non-Dan Jing film is formed to monitor the diffracted light so that the laser irradiation step optimization; and cooling the substrate in a state, the step of laser irradiation.