The fabrication of planar waveguides on Bi12TiO20 crystals by oxygen and helium ion implantation

Abstract We report the first fabrication and characterization of optical planar waveguides in Bi 12 TiO 20 crystals by ion implantation. For comparison we selected O 2+ and He + as our implanted ions. The loss value of the oxygen-implanted planar waveguide is reduced to 1.24 dB/cm after annealing at 260 °C for 30 min. The guided-mode profiles are successfully modeled through numerical simulations.