Apparatus and method for coating surfaces

2010 
Device (1) for coating of surfaces, comprising a burner (2) with a burner input (2.1) and a burner outlet (2.2) comprising a Precursorzufuhreinheit (3) for supplying at least one precursor (P) into the burner (2) and comprising a gas supply unit (4) for supplying a carrier gas and / or fuel gas (B), characterized in that the current on the output side after the Precursorzufuhreinheit (3) and the gas supply unit (4) and current on the input side in front of the torch inlet (2.1) a having a cavity (5.1) settling unit (5) is arranged to reduce turbulence of a Precursorstromes wherein the settling unit (5) has one or more inlet openings (E1, E2) for feeding the precursor (P) and / or the carrier gas and / or of the fuel gas (B), wherein the input port (E1, E2) or the inlet openings (E1, E2) or are arranged such that the precursor (P) within the cavity (5.1) coaxially of de m carrier gas is flowing around and / or the fuel gas (B), wherein an input to the burner (2.1) coupled portion of the settling unit (5) tapering diameter is formed with a.
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