Wafer Sawing 공정에서 발생한 ESD 불량원인 규명에 관한 연구

In the manufacturing lines, electrostatic discharge (ESD) damage is one of challenging failures to figure out the root cause. Electrical overstress (EOS) could be quite common failure mode of field returns, and its failing signature would be relatively macroscopic or burnt mark of EOS is readily vis...