TiO2 chemical vapor deposition on Si(111) in ultrahigh vacuum: Transition from interfacial phase to crystalline phase in the reaction limited regime
2011
The interaction between the metal organic precursor molecule titanium(IV) isopropoxide (TTIP) and three different surfaces has been studied: Si(111)-(7 x 7), SiOx/Si(111) and TiO2. These surfaces r ...
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
22
References
15
Citations
NaN
KQI