UV LUMINESCENCE AND SPECTRAL PROPERTIES OF ZNO FILMS DEPOSITED ON SI SUBSTRATES

Abstract Cathodoluminescence and photoluminescence properties of ZnO films deposited on Si substrates are presented. The electronic states of the ZnO film are assigned by means of the reflection spectra and photoelectron spectra in UV–VUV region. The luminescence spectrum consists of two main emission bands peaking at 392 nm (UV) and 523 nm (green). Intensity of the UV band superlinearly increases with rising density of the electron beam, while intensity of the green band increases sublinearly.