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Activation Process and Mechanism of ZrCoCe Getter Films
Activation Process and Mechanism of ZrCoCe Getter Films
2019
Yao Hua Xu
Yao Zong Sui
Xiao Zhang
Hao Liu
Peng Yuan
Feng Wei
Keywords:
Sputter deposition
Non-Evaporable Getter
Getter
Composite material
X-ray photoelectron spectroscopy
Metallurgy
Materials science
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