Fabrication of domain inverted ridge waveguide in ion-sliced LiNbO3 for wavelength conversion devices

High-refractive-index-contrast thin film ridge waveguides can confine light more strongly than conventional Ti-indiffused and annealed/proton-exchanged waveguides. We fabricated domain inverted structures by voltage application method and ridge waveguides by proton-exchange accelerated etching in bonded ion-sliced thin film LiNbO3 crystals for implementation of highly efficient wavelength conversion devices.