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Chlorine-based plasma deep etching of bulk titanium
Chlorine-based plasma deep etching of bulk titanium
2016
Edouard Laudrel
Thomas Tillocher
Yannick Méric
Philippe Lefaucheux
Bertrand Boutaud
Remi Dussart
Keywords:
Titanium
Etching
Plasma
Chlorine
Materials science
Inorganic chemistry
Correction
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