Artificial hair cell with embedded piezoresistive force sensors

In this paper, we present the preparation, characterization and fabrication of flexible force sensors implemented with an electrically conducting nanocomposite polymer. The conductive polymer was composed of multi-walled carbon nanotubes (MWCNT) and polydimethylsiloxane (PDMS) which was processed into sensor configuration by using polymer MEMS technologies. We characterize and compare the conductivity and gauge factor of fabricated sensor as a function of different weight percentages of MWCNT (ranging from 6 to 16 %).