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Low temperature deep reactive ion etching
Low temperature deep reactive ion etching
2011
Kira L. Fishgrab
Travis Ryan Young
Michael Wiwi
R. J. Shul
Jascinda Clevenger
Keywords:
Deep reactive-ion etching
Dry etching
Etching (microfabrication)
Reactive-ion etching
Materials science
Inorganic chemistry
Chemical engineering
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