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Atomic Layer Deposition on Nano-particles using External Vibration
Atomic Layer Deposition on Nano-particles using External Vibration
2015
S.-W. Park
G. D. Han
H.J. Choi
J. H. Shim
Keywords:
Atomic layer epitaxy
Thin film
Nanoparticle
Atomic layer deposition
Layer by layer
Composite material
Vibration
Materials science
Correction
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