Surface acoustic wave resonator, and methods for its preparation and Oberfächenwellenfilter, oscillator, duplexer, and communication device that contain this
1999
Surface acoustic wave resonator (1; 11) having the following features: a piezoelectric substrate (2); and an interdigital transducer (3) formed on the piezoelectric substrate (2) is arranged, wherein the surface acoustic wave resonator (1; 11) is arranged so that it generates a Shear Horizontal wave, and wherein the interdigital transducer (3) an electrode film (3a), which is made of a metal containing Ta as its main component, and a first Al thin film (3b) which is on the electrode film (3a) is provided, wherein the first al thin film (3b) is thinner than the electrode film (3a).
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