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Influence of wet etching in KOH on defects in silicon nanowires formed by cryogenic dry etching
Influence of wet etching in KOH on defects in silicon nanowires formed by cryogenic dry etching
2020
Artem Baranov
Dmitry A. Kudryashov
I. A. Morozov
A. V. Uvarov
K. Yu. Shugurov
A. S. Gudovskikh
Keywords:
Dry etching
Etching (microfabrication)
Chemical engineering
Materials science
silicon nanowires
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