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Growth and coalescence of grains during the CVD of h-BN thin films
Growth and coalescence of grains during the CVD of h-BN thin films
2019
Tomoyasu Nakama
Kazuki Matsushita
Taira Watanabe
Hiroko Kominami
Kazuhiko Hara
Keywords:
Chemical engineering
Thin film
Materials science
Coalescence (physics)
sapphire substrate
Composite material
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