Large submillimeter and millimeter detector arrays for astronomy: development of NbSi superconducting bolometers

The achievement of the Planck and Herschel space missions in the submillimeter and millimeter range was made possible by a continuous effort on detector developments. Now limited by the intrinsic fluctuations of the radiation coming from the astronomical sources themselves, the sensitivity improvement requires the development of large arrays of detectors filling the focal plane of the telescopes. We present here the development of a TES array using NbSi sensors on SiN membranes. The readout electronics is based on SQUIDs and a cooled SiGe ASIC multiplexer. The detector is coupled with the input radiation by means of antenna. The present goal performance is adapted for the realisation of a ground based millimeter camera.