Highly Damage-Resistant Reflectors for 248 nm Formed by Fluorides Multilayers

we investigated the laser damage thresholds and optical performances of fluorides multi-layered reflectors, consisting of middle index fluoride and Na3AlF, for high power KrF laser applications. It was found the damage thresholds of those reflectors are significantly improved by laser annealing. Those reflectors with annealing resisted against the fluence of 18-27 J/cm2 (this fluence varies on combinations of various fluorides) for 248 n, 15 nsec, 10Hz pulses.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.