Ablation Plume Induced by Laser Euv Radiation

In this paper we report results of study laser plasma plumes created by nanosecond EUV laser pulses at wavelength of 46.9 nm in different materials (Au, Al, Si, Cu). Experiment with attenuation of Al filters for verification of energy of laser pulses was performed. In the ablation plume experiment low energy of laser pulse in the most cases was not sufficient for creation of ablation plumes in Cu, Al and Si. In contrast, higher energy has a greater effect in all the materials.