Low-power micromachined structures for gas sensors with improved robustness
2000
Current research on microstructures for semiconductor gas sensors is on development on low power and robust substrates. In this paper a microstructure based on the combination of micromachined silicon substrates and glass wafers is presented. This device shows high robustness and can reach high temperatures up to 700$DEGC with good power consumption. The optimisation of the design and the process fabrication is described.
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