Design, fabrication, and integration of micro/nano-scale photonic crystal devices and plasmonic devices for VLSI photonic integration application
2006
We present on the design, fabrication and integration of micro/nano-scale photonic crystal devices and plasmonic
optical devices for VLSI photonic integration application. Using photonic crystals, we design and fabricate nanoscale
directional couplers, multimode interference devices, power splitters, wavelength splitters, triplexers, filters, and
develop their integration and interconnection schemes and technology. Using plasmonic structures, we design and
fabricate horizontal directional couplers, vertical directional couplers, and chirped grating plasmonic structures to
generate subwavelength lightwaves to be focused onto nano-potonic devices and modules. We examine scientific and
technological issues concerning the miniaturization, interconnection, and integration of these nano-scale photonic
devices for applications toward functional VLSI integrated circuits and systems.
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