Ion beam damage assessment and waveguide formation induced by energetic Si-ion irradiation in lanthanum aluminate crystal

Abstract Lanthanum aluminate (LaAlO 3 ) crystal has emerged as one of the most valuable functional-materials, and its physical, electronic and optical properties strongly depend on the crystal structure, which can be easily altered in an irradiation environment and therefore affect the performance of LaAlO 3 -based devices. On the other hand, the preparation of LaAlO 3 waveguide is also a scientific challenge for its potential application prospects in optoelectronics field. In this work, the damage evolution behavior of LaAlO 3 crystal under Si-ion irradiation has been discussed in detail utilizing complementary characterization techniques, and then, single-mode waveguide of LaAlO 3 crystal in the visible band can be obtained based on ion-irradiation-induced lattice damage behavior. Waveguide optical-coupling techniques are used to show its competitive features. Thus, novel optical waveguides with optimized features in LaAlO 3 crystals can be tailored by a proper selection of ion mass, energy and fluence using the modification of the target material during ion irradiation process.