Old Web
English
Sign In
Acemap
>
Paper
>
Characterization of thin ZrO[sub 2] films deposited using (ZrO[sup i]–Pr)[sub 2](thd)[sub 2] and O[sub 2] on Si(100)
Characterization of thin ZrO[sub 2] films deposited using (ZrO[sup i]–Pr)[sub 2](thd)[sub 2] and O[sub 2] on Si(100)
2002
Hsin-wei Chen
D. Landheer
Xin-Chang Wu
S. Moisa
G. I. Sproule
Tien-Sheng Chao
Tiao-Yuan Huang
Keywords:
Analytical chemistry
Total harmonic distortion
Inorganic chemistry
Chemistry
Correction
Cite
Save
Machine Reading By IdeaReader
9
References
2
Citations
NaN
KQI
[]