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Depth calibrations of a 2D-CMOS-based partially coherent light interferometer
Depth calibrations of a 2D-CMOS-based partially coherent light interferometer
2018
Claudio Pernechele
Simonetta Chinellato
F. Manzan
Simone Carmignato
Alessandro Voltan
Keywords:
Composite material
CMOS
Materials science
Calibration
Optics
Interferometry
Coherence (physics)
Correction
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